On
these pages, the technical specifications, performance attributes
and test data for the both the micromachined silicon pins and
the holder/printhead are discussed. Information is included on
both the substantial advantages of the silicon microcontact printing
pins over the traditional machine shop steel pins and quantitative
data demonstrating the superior performance of the Silicon Microarray
technology for your microcontact printing applications.
The
topics covered in this section are:
Introduction
The Silicon Microcontact
Printing Pins
The Printhead and
Micromachined Collimators
Data
showing the lack of prespotting phenomenon
Technical
Data on Printing Performance
Other
Applications
Introduction
The
ultra high precision of the printed patterns made by the micromachined
silicon microcontact printing pins is made possible by the great
accuracy of the photolithographic and etching processes used
to fabricate the pins. In order to print in an ultra high resolution
fashion, both the print tips and the pin holder must possess
extremely high tolerances. As with all types of contact printing,
the silicon pins and commercial steel pins require the application
of force on the pin in order to press the print tip surface
against the substrate to print satisfactorily. This pressure
requirement, combined with the fact that no substrate is perfectly
flat, dictate the printing pins must be compliant and be allowed
to move in the z
direction (perpendicular to the plane of the substrate). However,
to accurately print features on a grid pattern (i.e. to pack
the spots as densely as possible without touching) there can
be essentially no movement of the pin in the x
and y
directions when it moves up and down in z.
This presents the classic collimation dilemma of needing the
smallest possible tolerances between the sliding shaft and collimator
without binding.
These
problems are addressed by micromachining two silicon plates
that are placed parallel to one another in a holder and have
rectangular slots to guide and collimate the rectangular shafts
of the pins. Our devices have tolerances of only ~5 to 10 microns
(0.00025") between the pin shaft and the collimator because
of the flatness of the silicon pin (derived from the extreme
flatness of the wafer from it was etched), the mirror smoothness
of the sliding silicon-on-silicon surfaces and the fine tolerances
achievable from the micromachining process. It is clear that
to print ever denser arrays, the quality and accuracy of the
collimation will have to increase concomitantly with the size
diminution of the print tip in order to print smaller spots
closer together. The micromachining employed for the Silicon
Microarray technology fabrication will be able to provide
spot size and density to match scanner resolution increases
into the future. The Silicon Microarray technology can
adapt and grow with your future needs to print ever denser arrays.
But
before beginning a discussion of the detailed technical specifications
of the pins and holders, the following pictures provide dramatic
illustrations of some unique physical properties of silicon.
Don't try any of these experiments with your steel pins!
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Fig.
1
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Fig.
2
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Fig.
3
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Fig.
4
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Fig.
5
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Fig.
6
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Please
click on the images to enlarge them: (1) an X-acto®
knife blade inserted between the prong of a silicon microarray
pin spreading the prongs apart from 25 to 200 microns. Unless
stressed beyond the breakage point, the very high elasticity
of silicon allows 100% recovery of the original shape; (2) the
pins are unaffected by concentrated nitric acid or H2O2/H2SO4
at room temperature; (3) a silicon pin in the flame of a butane
torch glowing red hot; (4) after placing a weight on the silicon
pin to generate a pressure of ~1600 lbs/in2 (~100
bars) on the print tip, the tip shows no visible wear after
50,000 print cycles on aluminum oxide sandpaper; (5) the pins
survive a fall from the bench top to the floor; (6) Pins dipping
directly from a 1536 source plate.
The
Silicon Microcontact Printing Pins
Go To Top
To
dip a pointed object into a liquid and transfer the liquid to
a smooth surface to make a pattern is a very old human activity.
The silicon microarray pins described here possess many similarities
between feather quill pens and fountain pins but also have myriad
unique and important features and attributes that make them
particularly suitable for microcontact printing. The properties
of silicon and silicon oxide make them a logical next step in
the fabrication of high precision writing and printing tools
because of the ability to fabricate extremely small, durable
and accurate features in a material that will pick up and release
the desired printing fluid.
The
silicon pins are manufactured from extremely flat, highly polished
single crystal silicon wafers and therefore each pin is a single
crystal silicon except for a thin SiO2 coating. This
thin, extremely pure SiO2 coating however serves
several extremely important roles. From a molecular surface
viewpoint the pin surface is pure silica and therefore has the
well known properties associated with glass or quartz such as
well known wetting behavior, the ability to be chemically derivatized
fluid uptake and release and cleaning. The dense, highly conformal
SiO2 coating is made by treating the finished pins
in steam at T > 900°C. Many pins are formed from the
single crystal wafers in parallel. The pins are etched from
the wafers by a series of photolithographic and DRIE operations
as described in the silicon
micromachining section of this website. Since the photomask
used to define the structure of the pins and the pins are synthesized
at the same time, the pins are essentially identical in structure
and behavior.
Several
of the features, advantages and benefits of the Silicon Microarray
technology, as compared to machine shop fabricated steel pins,
are shown below in Table 1.
Table
1 Comparison of the features, advantages and benefits between
silicon and stainless steel microspotting pins
Feature/Benefit
|
Silicon
Microarray
|
Stainless
Steel
|
Packing
density of pins into holder |
Very
High; 96, 384 or 1536 source plates can be directly used,
<1mm pin spacing possible |
Packing
density of steel pins limited to 4.5 mm |
Highly
precise volumetric uptake |
Smaller
(25 - 250 nL per dip) volumetric uptake, reduced oligo
waste |
Larger
(~ 1 - 2 µL) |
Prespotting
phenomenon |
Essentially
no prespotting is observed |
Prespotting
is observed |
Cost |
<25% the cost of the current finest printing technologies |
Expensive |
Complete
depletion of printing fluid from pin |
The
pins print to dryness utilizing all sample imbibed |
Most
fluid taken remains in pin |
Tip
sizes available |
Tip sizes ranging from 50x50µm to 200x200µm |
Tip sizes ranging from 75µm to 360µm in diameter |
Deposited
drop size and uniformity |
Since
tip has smaller, more precise features, smaller more uniform
spots result |
Larger,
more irregular spots |
Pin-to-pin
uniformity as manufactured |
Pins
are identical |
Much
more variability |
Hardness
of tip material |
Much
harder, no tip deterioration such as bending, blunting
or mushrooming |
Softer,
less resistance to tip bending |
Ease
of mass production |
Parallel
fabrication using semiconductor fabtiction technologies |
One
at a time in a machine shop |
Machining
tolerances/feature size |
In
micrometers (µm), 25µm =0.001" |
In
thousandths of an inch |
Ease
of complex feature fabrication |
All
features (large or small) made at once |
Each
feature individually machined |
Surface
friction sliding against other materials |
Lower,
leading to reduced wear and improved repeatability |
Higher,
requires hand polishing |
Weight
of pins |
Si
pins weigh 0.5% of steel pins; less tip wear |
Heavy
pins damage tips |
Chemical
resistance |
Excellent |
Good |
Methods
known to chemically modify surface |
Extensive
surface chemistry of SiO2 known |
Less
well developed |
The
silicon pins are fabricated by a plasma etching technique known
as DRIE (Deep Reactive Ion Etching; see our web page on silicon
microfabrication). Employing the so-called "Bosch"
process, narrow trenches can be cut into silicon with aspect
ratios as high as 1:20 or even 1:30 with nearly vertical sidewall
slopes. Using this technique, many pins are simultaneously cut
from a double side polished 100mm or 150mm silicon wafers that
are either 200µm or 300µm thick. The two large surfaces
of the flat silicon pin shaft (200µm thick by 1000µm
wide), which are as flat as the extremely flat polished wafers
surfaces, provides most of the surface area that contacts the
collimators (vide infra).
Please see the ordering
page for various pin sizes and styles available.
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Fig.
7 A photograph of micromachined silicon pins on
a 100mm (4") silicon wafer
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The
Printhead and Micromachined Collimators
Go To Top
In
this section, a description of the printhead, how it functions,
how the print tip pressure is controlled and how the pins are
collimated are covered.
In order to print a spot of sufficient quality, in direct analogy
to stamping a pattern with an ink coated rubber stamp, the print
tip pressure must be controlled to optimize quality. Too little
pressure and the printed deposit could be misshapen or too light,
but with too much pressure, the spot can enlarge. In addition
to the proper pressure, it is also obvious that high quality
printing dictates the pins be very highly collimated and be
allowed to move in the z
direction (perpendicular to the plane of the substrate) to provide
the requisite ideal printing pressure. However there cannot
be any motion at all in the x
and y
directions - the classic collimation problem.
The collimators in the printhead for the Silicon Microarray
technology are micromachined for maximum precision and the rectangular
shaft is fabrciated to have only 5µ of clearance on each
of the four sides of the collimating holes. Tolerances of this
magnitude are extremely difficult to achieve by traditional
machine shop fabrication techniques. Key to the functioning
of this high precision collimator are the flatness and straightness
of the pins shaft, the accuracy of the cut forming the collimation
hole, the hardness of the SiO2 pin and collimator
surface and, importantly, the collimator and pin are made of
the same material and therefore the pin and the collimator cannot
scratch or gouge each other. This latter fact is also important
in that the silicon pins can be used to print in a cold room
as the collimator and pin expand and contract at the same rate
thereby avoiding any seizure of the pins in the printhead upon
cooling or warming.
Instead
of the single tip pressure available from the currently used
metal pin printing protocols (i.e. the weight of the pin), the
silicon pins in the printhead are held in place by an elastomeric
foam which exerts a controllable linear force at moderate z
deflections of 0.05-0.30mm (Fig. 8).
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Fig.
8 Tip pressure vs z deflection data for four foams
with different stiffness
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It
is clear that in analogy to any type of contact printing, such
as printing press, an ink stamp or the currently used steel
pins, that there is an optimum printing pressure which is unlikely
to necessarily correspond to the weight of a printing pin. By
judicious choice of the "stiffness" and thickness
of the elastomeric foam, and the amount of z
deflection, a wide range of tip pressures are obtainable. Since
the elastomeric foam exerts force to return the pins to their
original rest position after deflection, users will never again
experience a pin that sticks in the printhead and fails to fall
back to its original position on the subsequent print cycle.
The very accurate collimation to print spots on a very fine
pitch is again provided by silicon micromachining. As shown
in Fig. 9, the collimator is wet etched on the top side to facilitate
loading of the pin and the bottom side is shaped by DRIE to
provide the 5µ tolerances required between the pin shaft
and the collimator.
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Fig.
9 Cross sectional view of the holes in the collimation
plates and a silicon pin |
Data
showing the lack of prespotting phenomenon
Go To Top
Fig. 10 shows spots of cy3
labeled random 9-mers in 3X SSC printed onto Superamine slides
at 60-65% RH. We obtained 625 spots per dip, with a spot size
variation as shown in Fig. 11 which displays a %CV of only 5.4%
with no prespotting at all.
Fig.
10 Microarrays of Cy3 labeled 9-mers in 3x SSC
printed at PSTI using 75X75µm silicon pins spaced
on 4.5mm centers with a spot spacing of 170µm (above).
The above image shows all the spots (including prespotting)
printed from a single uptake volume of 100nL. Arrays
printed with a spot spacing of 145µm (below) using
75x75µm tips. Please click on the images to see an
enlarged view of the arrays.
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Fig. 11 Spot size variation
of all the spots printed from a single uptake volume
(including prespotting) at RH 65%.
Total spots obtained per dip: 625
Avg spot dia.: 97µ
CV: 5.4%
Max. spot dia: 110µ
Min. spot dia: 90µ
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Technical
Data on Printing Performance Go
To Top
In
this section, the printing behavior of the pins is illustrated
including how the 3-D sculpting of the printing tip has essentially
eliminated the prespotting phenomena. Features such as spot
morphology, number of spots per dip, volume deposited as a function
of tip pressure, humidity and the spot uniformity are discussed.
In Fig. 10, spots of Cy3 labeled random 9-mers in 3X SSC printed
with 75x75 um tips are shown. Note the very high uniformity
of the spots and the conspicuous absence of the "donuts"
so often seen when the printed spots dry out.
With
representative pin dimensions, such as 100µ x 100µ
tips, a ~100nL reservoir and a 15µ metering channel width
at the tip, the pin will deliver approximately 400 spots per
dip at a relative humidity level of 65%. Note that this is ~10%
of the uptake of typical metal pins. The silicon pins can print
nearly 100% of the solution it imbibes, and since the amount
taken up into the pin is relatively small, the waste of precious
DNA solution is substantially abrogated. However, it should
be kept in mind that this small uptake is more susceptible to
evaporation than the very large amounts of liquid taken up into
the metal pins. In addition to wasting DNA, poorly controlled
humidity is extremely deleterious to the print quality primarily
due to the fact that the solution concentration and viscosity
would change rapidly upon evaporation. As shown in Fig. 12,
which show two identical print runs except that the humidity
was 35% and 65% RH, the spots printed at the higher relative
humidity are more numerous and are of obviously of much higher
quality.
Fig.
12 Arrays printed with silicon pins at two different humidity
levels 35% and 65% RH
In
a first for microcontact printing, a tip has been designed and
built that has virtually eliminated the prespotting phenomena.
The prespotting phenomena refers to those effects associated
with the deposition of much larger spots at the beginning of
print run (right after dipping into the source well), presumably
due to the printing solution sheeting off of the outside surface
of the pin instead of issuing from the print tip and reservoir/channel
itself (Fig. 13). The elimination of the prespotting can be
easily understood with the aid of Fig. 13 and the Quicktime®
movies available for download at http://www.parallel-synthesis.com/pins/.
In the thinned region of the print tip, the tip is machined
to provide a 100µ step that is perpendicular to the plane
of the pin shaft.
The
attractive forces between the solution and the surface, when
a surface is well wetted as is the case here with the aqueous
DNA printing solution on glass, are perpendicular to the surface
(Fig. 13). As can be seen in the above mentioned movies, when
the pin is removed from the source plate and the printing fluid
begins to sheet down the external surface of the pin shaft,
it is retained by the step and does not proceed to the tip and
onto the printing surface. In fact, the movies clearly show
that while the pin is printing from the tip, the fluid on
the shaft is actually traveling up the shaft away form the tip
and is attracted into the step and reservoir and never reaches
the print surface. In other words, only fluid passing through
the metering channel connecting the reservoir and print tip
is deposited onto the print surface.
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Fig.
13 Schematic representation of the printing solution
sticking to the surface of a non thinned pin and a thinned
pin
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Table 2 summarizes the physical parameters
and spot specifications for three different pin tip sizes
Table
2 Statistical analysis of arrays printed with Si Pins
(Arrays are printed on one slide in test print mode)
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Tip
Size
100 x 100µm
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Tip
Size
75 x 75µm
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Tip
Size
50 x 50µm
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Average
spot diameter
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100-130µm
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75-110µm
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50-80µm
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%
CV
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7%
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5%
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4%
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Total
number of spots per one dip
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350-400
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400-500
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500-600
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Volumetric
uptake
|
~
0.1µL
|
~0.1µL
|
~0.1µL
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Other
Applications
Go To Top
In
addition to the spotting of DNA microarrays, a wide variety
of other materials have been printed, such as:
Since
it is easy to chemically modify the surface of the silicon
pins, many materials can be imbibed and released from the
pins.