Overview

Parallel provides complete design and prototype construction for your micromachining and BioMEMS applications. Our unique and synergistic combination of micromachining, biotechnology MEMS application knowledge, biology, chemistry, mechanical engineering and materials science places us in a special position to provide rapid and cost effective solutions for a wide variety of problems and applications. Please use the information provided here to determine if micromachining and BioMEMS can address your application needs, then contact Parallel for totally confidential discussion of your needs.

When considering a micromachined solution for your application, the important initial questions are (a) is the process to prepare the device feasible? (b) are the feature size diminution, greatly increased machining accuracy and tolerance important to the function of the device? (c) can micromachining provide a cost effective solution (d) can the device be satisfactorily packaged or integrated into the current process?

Types of Structures and Functions Available from Silicon Micromachining

Referring to the various silicon micromachining techniques available, the following basic feature types can be fabricated:
· Holes: hole sizes depend on the substrate thickness but can range from a few microns to mm;
· Depressions, wells and pits: wall slopes and well shapes vary from vertical to round; shallow pits can be wet or dry etched; depth:width aspect ratios of >10 are possible under some conditions.
· Grooves and trenches: grooves with vertical or sloped sidewalls can be etched or machined. Dimensions range from microns to mm in width, depth and length
· Channels: bonding of a solid second wafer onto an array of grooves generates channels
· Membranes: Sections of the silicon wafer can be etched down to as low as 2-4 microns to create ultra thin membranes

Silicon, silicon microfabrication and the micromachining process have several inherent attributes and advantages that can be very important during the design process.

Incorporation of BioMEMS and Micromachining into the Device

Combining the basic etching and fabrication techniques discussed above with other silicon fabrication technologies and high precision traditional machining, the micromachined parts can be incorporated the device for the final application.

After examination of the types of structures and devices that can be prepared via perusal of this website, please contact Parallel to discuss the application of micromachining to your biotechnology, sensing, fluid handling and printing applications.